Apparatus for low-energy X-ray fluorescence using an Al K X-ray source and an Si(Li) detector

Autor:	R. G. Musket, S. J. Holmes
Rok vydání:	1990
Předmět:	Materials science business.industry Detector Analytical chemistry Sputter cleaning X-ray X-ray fluorescence Ion gun Fluorescence Characterization (materials science) Optics Atomic number business Spectroscopy
Zdroj:	X-Ray Spectrometry. 19:177-184
ISSN:	1097-4539 0049-8246
Popis:	The concept, design, characterization and operation of an apparatus for low-energy x-ray fluorescence are described. This system utilizes commercially available components in a novel arrangement. An Al K x-ray source, an ultra-thin-windowed Si(Li) detector and an ion gun for sputter cleaning were combined to perform analyses for elements with atomic number Z ⩾ 6. Pairs of slit collimators placed between the specimen and the x-ray detector defined the area analyzed. The system configuration permitted analyses over areas with a variety of dimensions (0.4–22 mm). Distinction between surface and bulk signals was possible using the sputter-cleaning capability.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::344be1bfa20c7381493064004884cb25 https://doi.org/10.1002/xrs.1300190406 Zobrazit plný text záznamu Plný text