Microstructure of Compositionally Graded PZT films Grown by Pulsed Laser Deposition

Autor:	S. A. S. Rodrigues, A. Khodorov, Mário Pereira, M. J. M. Gomes
Rok vydání:	2008
Předmět:	010302 applied physics 0303 health sciences 03 medical and health sciences Materials science business.industry 0103 physical sciences Optoelectronics Microstructure business 01 natural sciences Instrumentation 030304 developmental biology Pulsed laser deposition
Zdroj:	Microscopy and Microanalysis. 14:53-56
ISSN:	1435-8115 1431-9276
DOI:	10.1017/s143192760808937x
Popis:	Ferroelectric films with a composition gradient have attracted much attention because of their large polarization offset present in the hysteresis loops. Lead Zirconate Titanate (PZT) films were deposited on Pt/TiO2/SiO2/Si substrates by Pulsed Laser Deposition (PLD) technique, using a Nd:YAG laser (Surelite) with a source pulse wavelength of 1064 nm and duration of 5-7 ns delivering an energy of 320 mJ per pulse and a laser fluence energy about 20 J/cm2. The film growth is performed in O2 atmosphere (0,40 mbar) while the substrate is heated at 600°C by a quartz lamp. Starting from ceramic targets based on PZT compositions and containing 5% mol. of excess of PbO to compensate the lead evaporation during heat treatment, three films with different compositions Zr/Ti 55/45, 65/35 and 92/8, and two types of complex structures were produced. These complex structures are in the case of the up-graded structure (UpG), with PZT (92/8) at the bottom, PZT (65/35) on middle and PZT (55/45) on the top, and for down-graded (DoG) one, that order is reversed.
Databáze:	OpenAIRE
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