Radio frequency sheath formation and excitation around a stepped electrode

Autor:	G. A. Hebner, E. V. Barnat
Rok vydání:	2005
Předmět:	Debye sheath Argon Materials science General Physics and Astronomy chemistry.chemical_element Plasma symbols.namesake chemistry Physics::Plasma Physics Excited state Electrode symbols Radio frequency Atomic physics Spectroscopy Excitation
Zdroj:	Journal of Applied Physics. 97:063301
ISSN:	1089-7550 0021-8979
DOI:	10.1063/1.1846939
Popis:	Plasma and sheath structure around a rf excited stepped electrode is investigated. Laser-induced fluorescence dip spectroscopy is used to spatially resolve sheath fields in an argon discharge while optical emission and laser-induced fluorescence are used to measure the spatial structure of the surrounding discharge for various discharge conditions and step-junction configurations. The presence of the step perturbs the spatial structure of the fields around the step as well as the excitation in the region above the step.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::343855c66ee38e95bb66ae6f70fd94e3 https://doi.org/10.1063/1.1846939 Zobrazit plný text záznamu