| Popis: |
Holographic Microscopy is used to characterize sub-visible particles in CMP nanoparticles slurries. Results of these studies detect and identify a wide range of different large particle contaminants in nanoparticle slurries. Holographic characterization has the unique ability to measure the composition as well as the size of these contaminants. We will present results demonstrating the ability to detect, count and characterize compact dense agglomerates, loosely packed low-density agglomerates, glass particles, polymeric particles and oil droplets in nanoparticles CMP slurries. |
