Planarization Materials for Active Matrix Thin Film Transistor Arrays

Autor:	Ahila Krishnamoorthy, Richard Spear, Deborah Yellowaga, Amanuel Gebrebrhan, Hai Bien, Marie Lowe, Peter Smith, Mehari Stifanos
Rok vydání:	2007
Předmět:	Materials science business.industry Dielectric Active matrix law.invention Indium tin oxide Outgassing law Thin-film transistor Chemical-mechanical planarization Optoelectronics Material properties business Layer (electronics)
Zdroj:	MRS Proceedings. 1030
ISSN:	1946-4274 0272-9172
Popis:	Traditional plasma based dielectric films are conformal and cost-prohibitive for large displays. Solution based dielectrics are planarizing in nature and provide a flat surface for indium tin oxide (ITO) layer with the resultant uniform liquid crystal response throughout the pixel. In this paper, we present the display-related material properties and integration results obtained by using a solution-based organosilsesquioxane material. The material exhibits extremely high transmittance and planarization, low outgassing, high resistance to moisture absorption and diffusion, good adhesion to other layers integrated with it and ease of integration.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::34333e067969b78f3949295bf464a3c4 https://doi.org/10.1557/proc-1030-g01-07 Zobrazit plný text záznamu Full text from SpringerLink