Significantly reduced intrinsic dielectric constant and loss of nano-silica by direct fluorination

Autor:	Siyao Chen, Taijun He, Yongjiu Li, Xin Li, Yongbing Zhuang, Xu Wang, Yang Liu, Xiangyang Liu
Rok vydání:	2023
Předmět:	Process Chemistry and Technology Materials Chemistry Ceramics and Composites Surfaces Coatings and Films Electronic Optical and Magnetic Materials
Zdroj:	Ceramics International.
ISSN:	0272-8842
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::3432d860cf160815bd8898a7b48a9cb5 https://doi.org/10.1016/j.ceramint.2023.04.104 Zobrazit plný text záznamu Full Text from ScienceDirect