Effects of deposition conditions on the phase formation of YBCO films prepared by spray pyrolysis method

Autor: Ho-Jin Kim, Gye-Won Hong, Jinho Joo, Sun-Weon Lim, Shin-Geun Park, Suck-Kwan Hong, Hee-Gyoun Lee, Sun-Wang Lee
Rok vydání: 2006
Předmět:
Zdroj: Physica C: Superconductivity and its Applications. :598-602
ISSN: 0921-4534
DOI: 10.1016/j.physc.2006.04.086
Popis: YBa 2 Cu 3 O y superconducting films were deposited on LaAlO 3 (1 0 0) single crystal substrates by spray pyrolysis method. Two types of ultrasonic and concentric nebulizer were used in order to generate fine droplets of metal-inorganic precursor solution. c -Axis oriented films were obtained at deposition temperature of 750–850 °C and at working pressures of 100 Torr and 500 Torr. In case of ultrasonic nebulizer, the films showed rough surface morphology due to the presence of enormous droplets, whereas smooth and dense films were obtained for concentric nebulizer. The good c -axis oriented YBCO films were formed at the wide range of the oxygen partial pressure. Oxygen which is generated via the decomposition of nitrate precursors is considered to participate in the formation reaction of YBCO film. Microstructures of YBCO films varied depending on oxygen partial pressure and rod-like grains were appeared when the oxygen partial pressure was lower than 30 Torr. YBCO films were deposited epitaxially on LAO(1 0 0) substrate. Δ ϕ of in-plane and Δ ω of out-of-plane texture were measured as 3.3° and 1.0°, respectively. A transport J c value of 0.50 MA/cm 2 at 77 K and self-field was achieved for the YBCO film deposited on LaAlO 3 (1 0 0) single crystal substrate.
Databáze: OpenAIRE