Backside-illuminated 6.6-μm pixel video-rate CCDs for scientific imaging applications

Autor: Robert Andreas, Robin Mark Adrian Dawson, Peter A. Levine, Pradyumna Kumar Swain, John R. Tower, Thomas M. Sudol, Vipulkumar Patel, James T. Andrews, Fu-Lung Hsueh, Grazyna M. Meray
Rok vydání: 2000
Předmět:
Zdroj: SPIE Proceedings.
ISSN: 0277-786X
Popis: A family of backside illuminated CCD imagers with 6.6 micrometers pixels has been developed. The imagers feature full 12 bit (> 4,000:1) dynamic range with measured noise floor of 50,000 e. The modulation transfer function performance is excellent, with measured MTF at Nyquist of 46% for 500 nm illumination. Three device types have been developed. The first device is a 1 K X 1 K full frame device with a single output port, which can be run as a 1 K X 512 frame transfer device. The second device is a 512 X 512 frame transfer device with a single output port. The third device is a 512 X 512 split frame transfer device with four output ports. All feature the high quantum efficiency afforded by backside illumination.
Databáze: OpenAIRE