Real-time monitoring of ruling grating resolution by digital wavefront
| Autor: | Jicheng Cui, Xiaotian Li, Bayanheshig, Yu Haili, Yang Chao, Yuguo Tang, Xiangdong Qi |
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| Rok vydání: | 2015 |
| Předmět: |
Wavefront
business.industry Computer science Fast Fourier transform Resolution (electron density) Physics::Optics Grating Atomic and Molecular Physics and Optics Displacement (vector) law.invention Optics Quality (physics) law Blazed grating Electrical and Electronic Engineering business Engineering (miscellaneous) Diffraction grating |
| Zdroj: | Applied Optics. 54:492 |
| ISSN: | 2155-3165 1559-128X |
| Popis: | In order to solve the problem that the grating quality cannot be monitored directly in real time, we provided a method based on Rayleigh criterion with our designing optical measurement structure to measure yaw and displacement errors of a grating ruling machine feeding system. Gratings are ruled with or without errors correction by the real-time monitoring system . It shows that the resolution obtained without errors correction is reduced from 99.97% to 87.47% of theoretical value, while the resolution obtained with errors correction is stable, remaining at 99.99%–97.21%. The experimental result is that the grating quality can be guaranteed by monitoring grating resolution in real time. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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