Design and fabrication of a D33-mode piezoelectric micro-accelerometer
| Autor: | Jie-nan Shen, Ma-hui Xu, Lin-hui Zhu, Hang Guo, Yibo Zeng, Hui Zhou, Yongjian Feng |
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| Rok vydání: | 2019 |
| Předmět: |
010302 applied physics
Fabrication Materials science Piezoelectric accelerometer Filling factor business.industry 02 engineering and technology 021001 nanoscience & nanotechnology Condensed Matter Physics Accelerometer 01 natural sciences Piezoelectricity Electronic Optical and Magnetic Materials Hardware and Architecture 0103 physical sciences Electrode Optoelectronics Electrical and Electronic Engineering Thin film 0210 nano-technology business Voltage |
| Zdroj: | Microsystem Technologies. 25:4465-4474 |
| ISSN: | 1432-1858 0946-7076 |
| DOI: | 10.1007/s00542-019-04495-z |
| Popis: | In this paper, a D33-mode piezoelectric micro-accelerometer with Pb1.1(Zr0.52Ti0.48)O3(PZT) thin film is designed, fabricated and tested. Both the polarization and deformation directions of the piezoelectric thin film are horizontal in this structure. With the high sensitivity and natural frequency, the D33-mode piezoelectric micro-accelerometer possesses improved practicality. The influence of filling factor (Γ) and interdigital electrode width (b) on the output voltage is analyzed in this work. The micro-electro-mechanical systems technology is then used to fabricate the piezoelectric accelerometer device, which is based on the Sol–Gel PZT piezoelectric thin film. Performance of the piezoelectric accelerometer micro-devices with the different Γ and b is tested on the vibration table. The experimental results show that the sensitivity of D33-mode piezoelectric accelerometer is inversely to the filling factor and interdigital electrode width. The piezoelectric accelerometer with a filling factor of 0.5 and an interdigital electrode width of 5 μm can generate an output voltage of 149.83 mV. |
| Databáze: | OpenAIRE |
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