Physical properties of AlxIn1−xN thin film alloys sputtered at low temperature

Autor:	Monica Enculescu, George E. Stan, Aurelian Catalin Galca, Cristina Besleaga, S. Costea, C. F. Miclea, I. Mercioniu, A. O. Mateescu, Viorel Georgel Dumitru
Rok vydání:	2014
Předmět:	Materials science Thin layers Lattice constant chemistry Band gap Aluminium Sputtering Analytical chemistry General Physics and Astronomy chemistry.chemical_element Texture (crystalline) Sputter deposition Thin film
Zdroj:	Journal of Applied Physics. 116:153509
ISSN:	1089-7550 0021-8979
DOI:	10.1063/1.4898565
Popis:	In this paper, we report on the structural, optical, and electrical properties of a wide compositional range of AlxIn1−xN thin layers deposited on glass and polyethylene terephthalate substrates. AlxIn1−xN layers of controlled composition were obtained by a simple reactive magnetron co-sputtering protocol, using a single aluminium target with indium insets, by varying the Al/In target surface area ratio, and the composition of the deposition atmosphere. The relevant physical properties were investigated and discussed. It is shown that the texture of the thin films is dependent on the cation ratio, while the bowing parameters of lattice constants and band gap values are larger than those of epitaxial layers.
Databáze:	OpenAIRE
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