Autor:	Wen Ying Li, Xiang Yong Kong, Xiang Liu, Li Wang Song, Cong Wei Liao, Mao Lin Wang, Li Chai, Mian Zeng, Yi Fang Chou, Tian Hong Wang, Chia Yu Lee, Li Mei Zeng, Xiao Di Liu
Rok vydání:	2017
Předmět:	010302 applied physics Materials science business.industry 0103 physical sciences Process (computing) 02 engineering and technology 021001 nanoscience & nanotechnology 0210 nano-technology Process engineering business 01 natural sciences
Zdroj:	SID Symposium Digest of Technical Papers. 48:1323-1326
ISSN:	0097-966X
DOI:	10.1002/sdtp.11891
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::33dcdb1f46bc7b139abf59cde5b4e15a https://doi.org/10.1002/sdtp.11891 Zobrazit plný text záznamu Plný text