Silicon Production by Centrifuge CVD Reactor on the Way to Industrial Verification
Autor: | Filtvedt, W.O., Klette, H., Sørensen, S., Filtvedt, J. |
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Jazyk: | angličtina |
Rok vydání: | 2016 |
Předmět: | |
DOI: | 10.4229/eupvsec20162016-2dv.3.7 |
Popis: | 32nd European Photovoltaic Solar Energy Conference and Exhibition; 1008-1010 A novel patented design of a rotating CVD chamber for production of polysilicon by decomposition of monosilane is demonstrated. The method has been proven through a first and second generation. It has been demonstrated that first grade polysilicon can be produced at a cash costnlower than all methods being utilized by the industry today. In this presentation we will give an update on the progress of the industrial verification project which will demonstrate the technology in full industrial scale. |
Databáze: | OpenAIRE |
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