Rapid Chemical Vapor Deposition of Yba2cu3ox Coatings

Autor:	E. K. Barefield, R. A. Jake, W. B. Carter, D. N. Hill, W. J. Lackey, John A. Hanigofsky, A.J. Green, K. R. Efferson, M. J. Shapiro, D.F. O'Brien, T.S. Moss
Rok vydání:	1989
Předmět:	Materials science Hybrid physical-chemical vapor deposition Chemical engineering Reagent Ion plating Deposition (phase transition) Sublimation (phase transition) Chemical vapor deposition Combustion chemical vapor deposition Thin film
Zdroj:	MRS Proceedings. 169
ISSN:	1946-4274 0272-9172
DOI:	10.1557/proc-169-585
Popis:	A rapid, controllable process for CVD of superconducting Yba2Cu30x has been developed. The new process relies on slowly feeding and pneumatically transporting powdered solid reagents directly into the CVD furnace; vaporizers are not used. Deposition rates two orders of magnitude greater than those achievable by reagent sublimation have been obtained using a powder feed mixture of Y, Ba, and Cu tmhd complexes (tmhd is tetramethylheptanedionate). Potentially, the process is applicable to thermally unstable, less volatile, lower cost reagents such as the acetylacetonates.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::339d5591d3d73a6739ee6aa2ed35ed52 https://doi.org/10.1557/proc-169-585 Zobrazit plný text záznamu Full text from SpringerLink