Comparative Analysis of Process Parameter Variations in DGFinFET Device Using Statistical Methods

Autor:	Najmiah Radiah Mohamad, Haroon Hazura, Anis Suhaila Mohd Zain, Ameer F. Roslan, K.E. Kaharudin, Afifah Maheran A. Hamid, S. K. Idris, Abdul Razak Hanim, Ibrahim Ahmad, Norhisham Mansor, A. M. Zaiton, B. Z. Zarina, Fauziyah Salehuddin
Rok vydání:	2018
Předmět:	History Materials science Process variable Algorithm Computer Science Applications Education
Zdroj:	Journal of Physics: Conference Series. 1123:012048
ISSN:	1742-6596 1742-6588
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::3392779395902513e1158b2b32ca187d https://doi.org/10.1088/1742-6596/1123/1/012048 Zobrazit plný text záznamu