Thermal Conductivity of Aluminum Nitride Thin Films

Autor:	S.D. Jacobs, L.J. Shaw-Klein, Stephen J. Burns
Rok vydání:	1990
Předmět:	Fused quartz Thermal conductivity Materials science law Thermal resistance Sapphire Nitride Composite material Thin film Conductivity Grain size law.invention
Zdroj:	MRS Proceedings. 203
ISSN:	1946-4274 0272-9172
DOI:	10.1557/proc-203-235
Popis:	Anomalously low laser damage resistance thresholds have been observed in many thin film systems. Thermal conductivity values well below bulk have been suggested as a possible cause. A series of reactively sputtered AIN films were deposited on fused quartz and sapphire substrates. Their thermal conductivities were measured using the thermal comparator technique. Important factors contributing to the apparently large thermal resistance in the AIN films include film surfaces, small grain size, and high oxygen concentration. Preferred orientation and columnar morphology also affect film conductivity. Film microstructures were observed by transmission electron microscopy, and correlated with measured values of thermal conductivity.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::334699534a5601261955280c38cc842c https://doi.org/10.1557/proc-203-235 Zobrazit plný text záznamu Full text from SpringerLink