| Popis: |
We demonstrate high-throughput, maskless patterning of biomolecules over centimeter scale areas with a diffraction-unlimited, sub-0.5 µm resolution using beam pen lithography (BPL), a technique employing a massively parallel array of near-field scanning probes. By integrating a digital micromirror device into the light path and aligning the grid of micromirrors to the grid of probes, we achieve independent actuation of >50,000 probes, enabling arbitrary patterning with high uniformity over the entire projection area. |
