Energy Harvesting in the Back-End of Line with CMOS Compatible Ferroelectric Hafnium Oxide

Autor:	Sukhrob Abdulazhanov, Lukas M. Eng, Kati Kühnel, Sebastian Oehler, Sabine Kolodinski, C. Mart, Wenke Weinreich, Malte Czernohorsky, R. Seidel, Sophia Eßlinger, Matthias Rudolph, Maciej Wiatr, K. Falidas, David Lehninger, Thomas Kampfe
Rok vydání:	2020
Předmět:	Back end of line Materials science CMOS business.industry Optoelectronics Refrigeration Thermoelectric materials business Energy harvesting Ferroelectricity Thermal energy Power density
Zdroj:	2020 IEEE International Electron Devices Meeting (IEDM).
DOI:	10.1109/iedm13553.2020.9371967
Popis:	We demonstrate the feasibility of thermal energy recovery in the back end of line (BEoL) employing CMOS-compatible ferroelectric hafnium oxide. Efficient pyroelectric energy harvesting with a sizable power density of 92 mWcm-3 under typical thermal conditions is achieved. Our energy harvesting approach exceeds the efficiency limit of commonly-used thermoelectric materials, without using a heat switch. The low-voltage operation, scalability, and abundance in CMOS manufacturing make HfO 2 -based ferroelectrics promising candidates for integrated energy harvesting and solid-state refrigeration applications.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::32ef7d0fca7f01d58b1a8f317fe3cf98 https://doi.org/10.1109/iedm13553.2020.9371967 Zobrazit plný text záznamu