Technical Report: Shack-Hartmann Long Trace Profiler: A New Generation of 2D LTP

Autor: Johan Floriot, Mourad Idir, Muriel Thomasset, Sylvain Brochet, François Polack, Samuel Bucourt, Thierry Moreno, P. Mercere, Xavier Levecq
Rok vydání: 2006
Předmět:
Zdroj: Synchrotron Radiation News. 19:25-27
ISSN: 1931-7344
0894-0886
Popis: The SH-LTP uses a 30 × 30 sampling point Shack-Hartmann Wavefront Sensor (HP26 / Imagine Optic). This sensor is optimized for working wavelengths around 400 nm, and offers high performances with accuracy less than λ/1000 rms and sensitivity less than λ/5000 rms. The light source is a single-mode fiber laser diode (405 nm). Once collimated with an achromatic doublet, the light is sent on the surface under test and reflected on the sensor for analysis (Figure 1). The basic principle is the same as for the conventional LTP [1]. However, the analysis pupil size of the sensor is about 12 × 12 mm2, with a spatial resolution of 450 μm (size of the microlenses), and at each point the local slopes are measured in both directions X and Y.
Databáze: OpenAIRE