A combined dispatching criteria approach to scheduling semiconductor manufacturing systems
| Autor: | Dan L. Shunk, John W. Fowler, Hung-Nan Chen, Russ M. Dabbas |
|---|---|
| Rok vydání: | 2001 |
| Předmět: |
Engineering
General Computer Science Job shop scheduling Semiconductor device fabrication business.industry Design of experiments General Engineering Scheduling (production processes) ComputerApplications_COMPUTERSINOTHERSYSTEMS Reliability engineering Wafer fabrication Hardware_INTEGRATEDCIRCUITS Wafer Discrete event simulation business Scale model Simulation |
| Zdroj: | Computers & Industrial Engineering. 39:307-324 |
| ISSN: | 0360-8352 |
| DOI: | 10.1016/s0360-8352(01)00008-0 |
| Popis: | The scheduling problem of semiconductor manufacturing systems has multiple responses of interest. The objective is to simultaneously optimize these different responses or to find the best-compromised solution. Most previous research in the area of semiconductor manufacturing systems has focused on optimizing a single performance measure. Dabbas and Fowler proposed a modified dispatching approach that combines multiple dispatching criteria into a single rule with the objective of simultaneously optimizing multiple objectives. In this paper, we validate their proposed approach using two different fab models at different levels of complexity: a hypothetical six stage-five machines Mini-Fab model and a full scale wafer fab model adapted from an actual Motorola wafer fab. We also discuss the actual implementation of the proposed dispatching algorithm into a scheduler for daily operation at a Motorola wafer fabrication facility. Results show an average 20% improvement for all responses when using the proposed dispatching approach. |
| Databáze: | OpenAIRE |
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