Functional Thin Films for Display and Microelectronics Applications
| Autor: | Marlene Mühlbacher, Robert Franz, Tanja Jörg, Nina Schalk, Francisca Mendez-Martin, Bernhard Sartory, Christian Mitterer |
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| Rok vydání: | 2015 |
| Předmět: |
Materials science
Liquid-crystal display genetic structures Diffusion barrier business.industry Nanotechnology General Medicine General Chemistry Combustion chemical vapor deposition equipment and supplies eye diseases law.invention Carbon film Thin-film transistor law Physical vapor deposition Electronic engineering Microelectronics sense organs Thin film business |
| Zdroj: | BHM Berg- und Hüttenmännische Monatshefte. 160:231-234 |
| ISSN: | 1613-7531 0005-8912 |
| Popis: | Within the last three decades, thin films grown by physical vapor deposition methods have found widespread applications. This article reports about recent research examples on molybdenum thin films, as used for thin film transistor liquid crystal displays, and on TiN diffusion barrier films, as used for microelectronics. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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