Gas molecule dissociation effect on rf discharge burning in low pressure ammonia

Autor: D. Douai, V. Cassagne, Vladimir Yegorenkov, S. Martins, K. Landry, Valeriy Lisovskiy, Jean-Paul Booth
Rok vydání: 2012
Předmět:
Zdroj: Physics Letters A. 376:2238-2243
ISSN: 0375-9601
DOI: 10.1016/j.physleta.2012.05.040
Popis: This Letter outlines the experimental study of molecule dissociation effect on rf capacitive discharge burning. We show that for each ammonia pressure value there exists some threshold rf voltage value below which the dissociation degree does not exceed 3%, but at higher rf voltage it grows to 30%. Increasing NH 3 dissociation degree accelerates the discharge current growth against rf voltage. The rf discharge remains in a weak-current α -mode at low as well as at high dissociation degree because all ammonia dissociation products possess ionization potentials exceeding that for NH 3 .
Databáze: OpenAIRE