Unusual phenomena in CVD SiO2under sustained electron bombardment

Autor:	D.M. Dobkin, R.J. Kane
Rok vydání:	1980
Předmět:	chemistry.chemical_compound Materials science chemistry Perforation (oil well) Oxide macromolecular substances Electrical and Electronic Engineering Composite material Electron bombardment Layer (electronics) Electronic Optical and Magnetic Materials
Zdroj:	IEEE Transactions on Electron Devices. 27:1841-1843
ISSN:	0018-9383
DOI:	10.1109/t-ed.1980.20114
Popis:	SEM observations of passivating oxide after roughly 100 h of exposure to 10-12-keV, 1-10-mA/cm2electrons disclosed several unexpected phenomena, including smoothing and removal of the surface, perforation of the layer, and the growth of filaments at the edges of the illuminated regions. Possible explanations for the above are discussed.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::32a4c03377df9d9b543d5978265ec065 https://doi.org/10.1109/t-ed.1980.20114 Zobrazit plný text záznamu