AFM based polarization nanolithography on PZT sol–gel films
| Autor: | Valentinas Snitka, Vitas Lendraitis, Kestutis Nemciauskas, A Ulcinas |
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| Rok vydání: | 2006 |
| Předmět: |
Materials science
business.industry Biasing Condensed Matter Physics Microstructure Ferroelectricity Piezoelectricity Atomic and Molecular Physics and Optics Surfaces Coatings and Films Electronic Optical and Magnetic Materials Optics Piezoresponse force microscopy Nanolithography Optoelectronics Electrical and Electronic Engineering Thin film business Laser Doppler vibrometer |
| Zdroj: | Microelectronic Engineering. 83:1456-1459 |
| ISSN: | 0167-9317 |
| Popis: | In this work, the possibility to create the inverted domain patterns on the surface of sol-gel derived ferroelectric PbTiO"3-PbZrO3 (PZT) thin films are demonstrated. Surface microstructure and local piezoelectric properties were investigated by piezoresponse atomic force microscopy. Macroscopic piezoelectric properties are investigated by laser Doppler vibrometry. PZT films exhibits high d"3"3 (93pm/V in unpoled and 419pm/V in poled state). Piezoresponse atomic force microscope (AFM) measurements were carried out by applying AC voltage (frequency 25kHz and amplitude of 2V) coupled with DC bias voltage between the grounded tip of AFM and Pt bottom electrode of the sample, and detecting first harmonics of resulting surface vibration by lock-in amplifier. The possibility to write and read the polarization patterns on the PZT thin film by piezoresponse AFM was confirmed. |
| Databáze: | OpenAIRE |
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