| Autor: |
Shujun Zhang, Fuh-Gwo Yuan, Wenbin Huang, Xiaoning Jiang, Seol Ryung Kwon |
| Rok vydání: |
2014 |
| Předmět: |
|
| Zdroj: |
Smart Sensor Phenomena, Technology, Networks, and Systems Integration 2014. |
| ISSN: |
0277-786X |
| DOI: |
10.1117/12.2045072 |
| Popis: |
A flexoelectric bridge-structured microphone using bulk barium strontium titanate (Ba0.65Sr0.35TiO3 or BST) ceramic was investigated in this study. The flexoelectric microphone was installed in an anechoic box and exposed to the sound pressure emitted from a loud speaker. Charge sensitivity of the flexoelectric microphone was measured and calibrated using a reference microphone. The 1.5 mm×768 μm×50 μm micro-machined bridge-structured flexoelectric microphone has a sensitivity of 0.92 pC/Pa, while its resonance frequency was calculated to be 98.67 kHz. The analytical and experimental results show that the flexoelectric microphone has both high sensitivity and broad bandwidth, indicating that flexoelectric microphones are potential candidates for many applications. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
|
