An Overview of Low Vacuum System for the Pressure Range from 1 Pa to 133 Pa

Autor:	S. S. Hong, Wakil Khan
Rok vydání:	2015
Předmět:	Pressure range Materials science Low vacuum business.industry Optoelectronics General Materials Science Surfaces and Interfaces business Instrumentation Spectroscopy
Zdroj:	Journal of the Vacuum Society of Japan. 58:69-71
ISSN:	1882-4749 1882-2398
DOI:	10.3131/jvsj2.58.69
Databáze:	OpenAIRE
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