A Multi-Process Microfabrication Simulatorb on Cellular Automata

Autor:	Marcelo Nelson Páez Carreño, Fábio Belotti Colombo
Rok vydání:	2010
Předmět:	Materials science Process (computing) Nanotechnology Cellular automaton Microfabrication
Zdroj:	ECS Transactions. 31:101-108
ISSN:	1938-6737 1938-5862
DOI:	10.1149/1.3474147
Popis:	We describe a 3D simulator for several fabrication techniques utilized to create MEMS. The software is based on a cellular automata model and allows the user to simulate several processes, such as anisotropic wet etching in alkaline solutions and DRIE on (100) oriented Si substrates. The simulator allows for arbitrarily shaped masking materials and several processes can be applied in sequence to the same substrate. This enables the software to simulate the fabrication of MEMS devices which require more than one etching step. Although the automata used are not the most complex available, many of the results shown here are still acceptable from an engineering point of view.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::32676187b6c1c652316309c3d27b096f https://doi.org/10.1149/1.3474147 Zobrazit plný text záznamu