Comparison of Three Focus Sensors for Optical Measurement of Rough Surface Topography

Autor:	Martin Šarbort, Jan Pavelka, Jindřich Oulehla, Josef Lazar, Miroslava Holá, Šimon Řeřucha, Tomáš Fořt
Rok vydání:	2020
Předmět:	White light interferometry Materials science Spatial light modulator business.industry Holography law.invention Optics law Optical sensing Rough surface business Optical topography Focus (optics) Laser beams
Zdroj:	Imaging and Applied Optics Congress.
Popis:	We compare three focus sensors designed for the optical topography measurement of rough surface specimens with submicron accuracy. The laser beam was modulated by three specific computer-generated holograms displayed on a spatial light modulator.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::325720c98b1d5462dfd4c311f89d1cf1 https://doi.org/10.1364/dh.2020.hth5h.2 Zobrazit plný text záznamu