Autor: |
Shaibal K. Sarkar, Sagar Mitra, Uttam Kumar Sen, Dip K. Nandi, Devika Choudhury |
Rok vydání: |
2014 |
Předmět: |
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Zdroj: |
Electrochimica Acta. 146:706-713 |
ISSN: |
0013-4686 |
DOI: |
10.1016/j.electacta.2014.09.077 |
Popis: |
Molybdenum sulfide is deposited by atomic layer deposition (ALD) using molybdenum hexacarbonyl and hydrogen sulfide. Film growth is studied using in-situ quartz crystal microbalance, ex-situ X-ray reflectivity and ellipsometry. Deposition chemistry is further investigated with in-situ Fourier transform infrared spectroscopy. Self-limiting nature of the reaction is observed, typical of ALD. Saturated growth rate of 2.5 A per cycle at 170 °C is obtained. As-deposited films are found amorphous in nature. As-grown films are tested as lithium-ion battery anode under half cell configuration. Electrochemical charge-discharge measurements demonstrate a stable cyclic performance with good capacity retention. Discharge capacity of 851 mAh g −1 is obtained after 50 cycles which corresponds to 77% of capacity retention of the initial capacity. |
Databáze: |
OpenAIRE |
Externí odkaz: |
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