Autor:	Tomomi Ino, Kazuhiro Minami, Tomoaki Kubo, Masateru Minami, Tetsuya Homma
Rok vydání:	2009
Předmět:	Computer science Semiconductor device fabrication Non normal distribution Control chart Statistical process control Reliability engineering
Zdroj:	SICE Journal of Control, Measurement, and System Integration. 2:246-254
ISSN:	1884-9970 1882-4889
DOI:	10.9746/jcmsi.2.246
Popis:	To maintain stable operation of semiconductor fabrication lines, statistical process control (SPC) methods are recognized to be effective. However, in semiconductor fabrication lines, there exist a...
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::322853fbe899fdd4b5800c362c9387cf https://doi.org/10.9746/jcmsi.2.246 Zobrazit plný text záznamu