Structure and properties of thin PZT films with inhomogeneous composition distribution

Autor:	V. P. Pronin, V. A. Vol’pyas, S. V. Senkevich, M. V. Staritsyn, E. Yu. Kaptelov, D. M. Dolgintsev, I. P. Pronin
Rok vydání:	2019
Předmět:	History Materials science Distribution (number theory) Structure (category theory) Composite material Composition (combinatorics) Computer Science Applications Education
Zdroj:	Journal of Physics: Conference Series. 1281:012063
ISSN:	1742-6596 1742-6588
DOI:	10.1088/1742-6596/1281/1/012063
Popis:	The paper presents the results of studies of bilayer thin ferroelectric PZT films with a lead content variation on the films thickness, formed by the method of radio-frequency magnetron deposition at different pressures of the gas mixture. It was shown that, depending on the sequence of deposition of the layers, both the structure and the dielectric parameters of the samples change.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::31edf0c27298f5ec4074bb555f414dfe https://doi.org/10.1088/1742-6596/1281/1/012063 Zobrazit plný text záznamu