P‐6.11: ESD Related Defects Analysis and Improvement Design Solution in TFT‐LCD Array Process
| Autor: | Luqin Chen, Wendong Shen, Xiaona Zhang, Maocheng Yan, Bo Tang, Huijie Zheng, Wei Jiang, Jingsi Zhang, Xiangcao Chen, Chunxi Guo, Ting Lu, Ting Li |
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| Rok vydání: | 2021 |
| Předmět: | |
| Zdroj: | SID Symposium Digest of Technical Papers. 52:875-878 |
| ISSN: | 2168-0159 0097-966X |
| DOI: | 10.1002/sdtp.15312 |
| Databáze: | OpenAIRE |
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