In Situ Quadrupole Mass Spectrometry and Quartz Crystal Microbalance Studies on the Atomic Layer Deposition of Titanium Dioxide from Titanium Tetrachloride and Water

Autor:	Mikko Ritala, Raija Matero, and Antti Rahtu
Rok vydání:	2001
Předmět:	Heavy water General Chemical Engineering Analytical chemistry General Chemistry Quartz crystal microbalance Mass spectrometry chemistry.chemical_compound Atomic layer deposition chemistry Quadrupole Titanium dioxide Materials Chemistry Titanium tetrachloride Quadrupole mass analyzer
Zdroj:	Chemistry of Materials. 13:4506-4511
ISSN:	1520-5002 0897-4756
Popis:	The atomic layer deposition (ALD) of TiO2 from TiCl4 and D2O at 150−400 °C was studied in situ with a quadrupole mass spectrometer (QMS) and a quartz crystal microbalance (QCM). The ALD growth proceeds via exchange reactions on the film surface. In the first step, TiCl4 is introduced on a surface covered with −OD groups which then become replaced with −O−TiClx species, and DCl is released as a volatile byproduct. In the second step, the incoming D2O reacts with the surface −Cl atoms replacing them with −OD groups and, again, DCl is released. When the temperature is increased from 150 to 250 °C, the number of −Cl ligands released during the TiCl4 pulse decreases from about two to one. At temperatures higher than 250 °C, less than one −Cl ligand is released, indicating molecular adsorption of TiCl4.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::31c9c217706341e72494a7e9590b8614 https://doi.org/10.1021/cm011046+ Zobrazit plný text záznamu