Study of a piezoelectric multimorph based micro-scanner
| Autor: | M. Begbie, A. Chaehoi |
|---|---|
| Rok vydání: | 2008 |
| Předmět: |
Engineering
Scanner Piezoelectric sensor business.industry Acoustics ComputingMethodologies_IMAGEPROCESSINGANDCOMPUTERVISION System-level simulation Structural engineering Condensed Matter Physics Strength of materials Piezoelectricity Finite element method Electronic Optical and Magnetic Materials Hardware and Architecture Deflection (engineering) Electrical and Electronic Engineering business Actuator |
| Zdroj: | Microsystem Technologies. 14:963-969 |
| ISSN: | 1432-1858 0946-7076 |
| DOI: | 10.1007/s00542-007-0496-9 |
| Popis: | This paper concerns the modeling of a piezoelectric micro-scanner. The micro-scanner presented in this paper uses multimorph-type bending actuators to tilt a square plate mirror. A complete analytical model of the piezoelectric micro-scanner is presented. Each step of the modeling has been validated by Finite Element Modeling. This theoretical model based on strength of material equations calculates the force generated by the multimorphs on the mirror, the profile of the structure and the angular deflection of the mirror. The proposed model, used to optimize the design of the piezoelectric silicon micro-scanner, is intended for further HDL integration, thereby allowing rapid system level simulation and optimization. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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