Mass transfer of elements in the undersurface layers under combined treatment by pulsed ion beams and plasma flows

Autor:	I.B. Stepanov, I.A. Shulepov, V.G. Tolmacheva, Yu.P. Usov, Alexander I. Ryabchikov, V. K. Struts, A. V. Petrov
Rok vydání:	2002
Předmět:	Materials science Ion implantation Ion beam deposition Ion beam Ion beam mixing Plasma Atomic physics Ion gun Ion Power density
Zdroj:	5th Korea-Russia International Symposium on Science and Technology. Proceedings. KORUS 2001 (Cat. No.01EX478).
Popis:	Results are presented for some processes occurring at different stages of strong adhesion of coatings and modified layers creation with the use of high-dose implantation and deep diffusive doping of elements under pulsed energetic impact. The investigations have been carried out to consider the possibility of combined materials treatment with pulsed ion beams of power density ranging from 10/sup 3/ to 10/sup 8/ W/cm/sup 2/. The facility includes the accelerator of high-power ion beams and the sources of repetitively-pulsed metal ion beams and metal plasma flows.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::31b1edd32ae551e301614e9b9257e24c https://doi.org/10.1109/korus.2001.975152 Zobrazit plný text záznamu