Mécanisme de décomposition des composés M(NEt) (M = V, Cr) lors de leur utilisation comme mono-source pour la croissance de films M-C-N par MOCVD

Autor:	Francis Maury, Patrick Cassoux, P Bonnefond, Benoît Chansou, A Reynes, R Feurer, Robert Choukroun
Rok vydání:	1998
Předmět:	Decomposition pathway Low nitrogen Lability Chemistry Inorganic chemistry Materials Chemistry Physical chemistry Mass spectrometry Decomposition Chemical decomposition Group 2 organometallic chemistry
Zdroj:	Annales de Chimie Science des Matériaux. 23:667-679
ISSN:	0151-9107
DOI:	10.1016/s0151-9107(99)80015-4
Popis:	Both NMR identification of the decomposition by-products of the organometallic compounds M(NEt2)4 (M = V, Cr) and on line mass spectrometry analyses in the MOCVD reactor have been used, in relation with the main features of the films, to discuss a decomposition pathway which accounts for the lability of the NEt2 ligands and accordingly the low nitrogen content of the films.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::3185bcb95126ba4a5772d2e213f38b88 https://doi.org/10.1016/s0151-9107(99)80015-4 Zobrazit plný text záznamu