Modulation of Structural, Electronic, and Optical Properties of Titanium Nitride Thin Films by Regulated In Situ Oxidation
| Autor: | Manosi Roy, Kaushik Sarkar, Jacob Som, Mark A. Pfeifer, Valentin Craciun, J. David Schall, Shyam Aravamudhan, Frank W. Wise, Dhananjay Kumar |
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| Rok vydání: | 2023 |
| Předmět: | |
| Zdroj: | ACS Applied Materials & Interfaces. 15:4733-4742 |
| ISSN: | 1944-8252 1944-8244 |
| DOI: | 10.1021/acsami.2c18926 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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