Autor: |
Sang-Koo Chung, E.K. Choi, Y.-I Choi |
Rok vydání: |
2003 |
Předmět: |
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Zdroj: |
Microelectronics Journal. 34:683-686 |
ISSN: |
0026-2692 |
DOI: |
10.1016/s0026-2692(03)00096-x |
Popis: |
The breakdown voltage and on-resistance of a multi-RESURF LDMOS are studied numerically and analytically. The results are compared with those from the conventional LDMOS. Reduction of on-resistance by 23% is obtained for the multi-layer structure without degradation in the breakdown voltage. An analytical expression for the surface potential distribution of the multi-layer structure is derived which provides a useful mean to determine the breakdown voltage analytically in terms of the device parameters. |
Databáze: |
OpenAIRE |
Externí odkaz: |
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