Breakdown voltage and on-resistance of multi-RESURF LDMOS

Autor: Sang-Koo Chung, E.K. Choi, Y.-I Choi
Rok vydání: 2003
Předmět:
Zdroj: Microelectronics Journal. 34:683-686
ISSN: 0026-2692
DOI: 10.1016/s0026-2692(03)00096-x
Popis: The breakdown voltage and on-resistance of a multi-RESURF LDMOS are studied numerically and analytically. The results are compared with those from the conventional LDMOS. Reduction of on-resistance by 23% is obtained for the multi-layer structure without degradation in the breakdown voltage. An analytical expression for the surface potential distribution of the multi-layer structure is derived which provides a useful mean to determine the breakdown voltage analytically in terms of the device parameters.
Databáze: OpenAIRE