Low temperature annealed ZnO film UV photodetector with fast photoresponse

Autor: Minghui Cao, Zhongwang Sun, Zhi Yang, Jinyou Shao, Zhang Ke, Minqiang Wang
Rok vydání: 2017
Předmět:
Zdroj: Sensors and Actuators A: Physical. 253:173-180
ISSN: 0924-4247
DOI: 10.1016/j.sna.2016.07.026
Popis: Zinc oxide thin film UV photodetectors based metal-semiconductor-metal structure were fabricated on Au interdigital electrodes by radio frequency magnetron sputtering. The performances of the UV photodetector under different annealing and testing temperatures from RT to 200 °C have been studied, obtaining optimized annealing temperature and suitable working temperature range. The detailed photoresponse mechanism has been discussed by analyzing competitive behaviors of several factors. The photodetector has good photoresponse linearity across a wide range of incident light intensity, and the response time, recovery time and responsivity were 0.82 ms, 0.64 ms and 124 A/W respectively under the 2.5 mW/cm 2 at 5 V applied bias. The low annealing temperature of ZnO film makes it be applied in flexible photodetector with great potential.
Databáze: OpenAIRE