| Autor: |
Gregory N. Nielson, Paul J. Resnick, Leslie M. Phinney, David S. Epp, Uma Krishnamoorthy, Vipin P. Gupta, Jonathan W. Wittwer |
| Rok vydání: |
2009 |
| Předmět: |
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| Zdroj: |
Volume 12: Micro and Nano Systems, Parts A and B. |
| DOI: |
10.1115/imece2009-12980 |
| Popis: |
We have developed and demonstrated a technique for optical excitation of mechanical resonance that does not require coherent, monochromatic, or time-varying light. Previous methods for optically exciting mechanical motion in microscale devices required monochromatic, coherent light or time varying light. This technology could allow sunlight (or other ambient light source) to drive a MEMS device. It could also be used to convert sunlight to mechanical energy and subsequently to electrical energy through piezoelectric or capacitive techniques, essentially a micromechanical analog to the photovoltaic cell. We have demonstrated this method of optical excitation of a MEMS cantilever using simple cantilever beam structures fabricated using Sandia National Laboratories’ SUMMiT V™ process. The bimorph structure was created with polysilicon and aluminum. The minimum power to induce resonance was 3.5–4 mW of optical power incident on the cantilever under a vacuum of less than 1 mTorr. Resonance was observed at 45.6 kHz (slightly less than the 48.5 kHz predicted by FEA). |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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