Influence of rapid thermal annealing parameters on properties of YBaCuO thin films sputtered on polycrystalline zirconia

Autor: F.Hosseini Teherani, Joseph M. Baixeras, François Rémi Carrié, Alain J. Kreisler
Rok vydání: 1990
Předmět:
Zdroj: Journal of the Less Common Metals. :366-373
ISSN: 0022-5088
DOI: 10.1016/0022-5088(90)90235-c
Popis: High-Tc YBaCuO thin films have been prepared on polycrystalline ZrO 2 substrates by low temperature r.f. diode sputtering, followed by rapid thermal annealing (RTA). The gas atmosphere during RTA influences the roughness of the films and time/temperature parameters are critical. A Tc ( R = 0) of 85 K has been obtained with c-axis oriented films, but these have low Jc (1500 A.cm −2 at 77 K). Besides, repeated RTA processes are a suitable way to increase the grain size and improve the orientation of the films.
Databáze: OpenAIRE