On the reliability of probe diagnostics in RF plasma

Autor:	V. A. Obukhov, V. A. Ryabyi
Rok vydání:	2013
Předmět:	Physics Electron energy Physics and Astronomy (miscellaneous) business.industry Plasma Condensed Matter Physics Spectral line symbols.namesake Distribution function Optics symbols Langmuir probe Plasma diagnostics Atomic physics business Electron energy distribution function
Zdroj:	Plasma Physics Reports. 39:1130-1135
ISSN:	1562-6938 1063-780X
DOI:	10.1134/s1063780x13050164
Popis:	The errors of probe diagnostics of the resting or slow-moving plasma of Q-machines or dc discharges are shown to lie typically within a range of ±(20–30)%. Problems of probe diagnostics of RF plasma and modern approaches to their solving are considered. The objectivity of probe diagnostics of RF plasma is established by the mutual agreement between the electron energy distribution functions measured in the same experiment using the Langmuir probes and the method of relative intensities of spectral lines.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::30f6a24473c0b3c5738ef5ac92d198f5 https://doi.org/10.1134/s1063780x13050164 Zobrazit plný text záznamu Plný text ve formátu PDF