| Autor: |
Paul Muralt, Fazel Parsapour, Vladimir Pashchenko, Nicolas Kurz, Vadim Lebedev, Lutz Kirste, Oliver Ambacher, Nicolay Pascal |
| Rok vydání: |
2018 |
| Předmět: |
|
| Zdroj: |
2018 IEEE International Ultrasonics Symposium (IUS). |
| DOI: |
10.1109/ultsym.2018.8579706 |
| Popis: |
In this work, bar-and disk-shaped resonators were fabricated using $\text{Al}_{0.84}\text{Sc}_{0.16}\text{N}$ thin film. Sensitivity analysis of the resonators' resonance frequencies with respect to the piezoelectric material parameters revealed that resonance analysis can be used for material parameter extraction. An optimization algorithm is employed to determine the piezoelectric material parameters $\text{s}_{11}^{E}, \ \text{s}_{12}^{E}$ , and $\text{d}_{31}$ of $\text{Al}_{0.84}\text{Sc}_{0.16}\text{N}$ from the length-and radial-extensional mode. Using the piezoelectric constitutive equations and combining the results obtained in this work with the results obtained in a previous work, the stress-charge form of elastic and piezoelectric parameters could be derived. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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