Energy Conversion Efficiency in Low- and Atmospheric-Pressure Plasma Polymerization Processes, Part II: HMDSO
| Autor: | Bernard Nisol, Michael R. Wertheimer, Dirk Hegemann, Sean Watson |
|---|---|
| Rok vydání: | 2016 |
| Předmět: |
010302 applied physics
General Chemical Engineering Energy conversion efficiency Analytical chemistry Atmospheric-pressure plasma 02 engineering and technology General Chemistry Activation energy 021001 nanoscience & nanotechnology Condensed Matter Physics 01 natural sciences Surfaces Coatings and Films chemistry.chemical_compound Monomer Polymerization chemistry 0103 physical sciences Content (measure theory) Polymer chemistry Molecule 0210 nano-technology Energy (signal processing) |
| Zdroj: | Plasma Chemistry and Plasma Processing. 37:257-271 |
| ISSN: | 1572-8986 0272-4324 |
| Popis: | For at least forty years, there has been an interest to correlate the structure of plasma polymer coatings with fabrication parameters during deposition, most particularly with the energy input per monomer molecule, $$ E_{\text{m}} $$ . In our two laboratories, we have developed methods for measuring $$ E_{\text{m}} $$ (or somewhat equivalent activation energy, $$ E_{\text{a}} $$ ) in low- (LP) and atmospheric-pressure (AP) discharge plasmas. We earlier proposed energy conversion efficiency, ECE, as a new parameter which permits direct comparison of LP and AP experiments. This is done here for the case of a much-studied organosilicon precursor (monomer), hexamethyl-disiloxane. “Critical” $$ E_{\text{m}} $$ (or $$ E_{\text{a}} $$ ) values that demarcate ECE regimes separating different fragmentation/reaction mechanisms are found to agree remarkably well, and to correlate with specific mechanisms. Furthermore, deposition rates, and structural (for example, “organic/inorganic” content ratio) characteristics are seen to display very similar behaviors, despite additional drastically differing fabrication conditions like pure or highly diluted (in Ar carrier gas) monomer feed in the LP and AP cases, respectively. |
| Databáze: | OpenAIRE |
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