Fabrication of Thin Film Titania with Nanopoles and Nanopipes

Autor:	Jaewan Kim, C.J. Kang, Woon-Hyuk Baek, Yong-Sang Kim, Hyun-Jung Her, Young Jin Choi
Rok vydání:	2007
Předmět:	Materials science Fabrication business.industry Extreme ultraviolet lithography Nanotechnology Aspect ratio (image) Soft lithography Nanoimprint lithography law.invention Semiconductor Nanolithography law Optoelectronics Thin film business
Zdroj:	2007 Conference on Lasers and Electro-Optics - Pacific Rim.
DOI:	10.1109/cleopr.2007.4391347
Popis:	We demonstrate a formation of thin film titania (TiO2) with dense array of nanopores, nanopoles, and nanopipes. The heights of pores, poles and pipes are about 130 nm, 180 nm, 200 nm, respectively. The aspect ratio of these three structures is approximated between 2 and 3.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::30cd6150d951dcfb60081da800eba09b https://doi.org/10.1109/cleopr.2007.4391347 Zobrazit plný text záznamu