Ultra-Thin Diamond Films For X-Ray Window Applications

Autor:	Michael G. Peters, Jon McCarthy, Mark Breen, James L. Knowles
Rok vydání:	1990
Předmět:	Materials science Silicon business.industry Detector Analytical chemistry chemistry.chemical_element X-ray optics Diamond Chemical vapor deposition engineering.material chemistry Plasma-enhanced chemical vapor deposition Elemental analysis engineering Optoelectronics Thin film business
Zdroj:	SPIE Proceedings.
ISSN:	0277-786X
DOI:	10.1117/12.962081
Popis:	Diamond possesses a number of interesting properties that make it an ideal candidate for a variety of x-ray optical applications. Most notable are the high x-ray transmission, exceptional mechanical properties and low diffusion rate of diamond films. One application that has been made possible recently with plasma-enhanced chemical vapor deposition of diamond films is an ultra-thin x-ray detector window for elemental analysis. This paper discusses the advantages of using diamond films for this application and what developments were necessary in order to meet performance specifications. We will also discuss qualification testing of the x-ray window and suggest other areas of application which may benefit from this new technology.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::309c28acc3e1fdcb13cdb83cfdbf921d https://doi.org/10.1117/12.962081 Zobrazit plný text záznamu