| Autor: |
J. Curphy, Gregory F. Meyers, Jang-Hi Im, Jack E. Hetzner, G. Buske, E. O. Shaffer, Ted Stokich |
| Rok vydání: |
1999 |
| Předmět: |
|
| Zdroj: |
Proceedings International Symposium on Advanced Packaging Materials. Processes, Properties and Interfaces (IEEE Cat. No.99TH8405). |
| DOI: |
10.1109/isapm.1999.757286 |
| Popis: |
The adhesion performance of photo-BCB coatings were investigated using a new adhesion promoter, AP-3000, based on vinyltriacetoxysilane (VTAS) chemistry. A modified edge lift-off test (m-ELT) was employed to evaluate adhesion performance of photo-BCB on various surfaces: Si, SiN, Cu, and Al. Use of AP-3000 resulted in a large improvement of adhesion energies for these interfaces. Atomic force microscopy (AFM) and X-ray photoelectron spectroscopy (XPS) of these interfaces showed cohesive interfacial failure into the photo-BCB phase. The interfacial fracture energies approached the fracture toughness of photo-BCB, ca. 45 J/m/sup 2/. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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