The effect of pressure in the working chamber of a processing unit on the quality indicators of the composite structure formed in the metal product surface layer at low-temperature plasma modification

Autor:	Boris Brzhozovskii, Elena Zinina, Vladimir Martynov, Andrey Zakharevich
Rok vydání:	2022
Předmět:	Condensed Matter Physics Instrumentation Surfaces Coatings and Films
Zdroj:	Vacuum. 205:111403
ISSN:	0042-207X
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::3060ae180e944f1dfa023b8d670ef3a6 https://doi.org/10.1016/j.vacuum.2022.111403 Zobrazit plný text záznamu Full Text from ScienceDirect