The determination of uncertainties in quantitative XPS/AES and its impact on data acquisition strategy
| Autor: | L. B. Hazell, K. Harrison |
|---|---|
| Rok vydání: | 1992 |
| Předmět: |
Accuracy and precision
business.industry Chemistry Sample (statistics) Surfaces and Interfaces General Chemistry Condensed Matter Physics Poisson distribution Surfaces Coatings and Films symbols.namesake Optics Data acquisition Physical structure Transmission (telecommunications) X-ray photoelectron spectroscopy Materials Chemistry symbols Sensitivity (control systems) business Algorithm |
| Zdroj: | Surface and Interface Analysis. 18:368-376 |
| ISSN: | 1096-9918 0142-2421 |
| DOI: | 10.1002/sia.740180510 |
| Popis: | The accuracy of quantified XPS/AES compositions for a given sample depends on both systematic and random errors. Parameters such as escape depth, transmission functions, sensitivity factors and whether the model of the surface physical structure used in the quantification procedure is appropriate contribute systematic errors to the quantification. Random errors arise from the Poisson statistics of electron detection. However, in many applications of practical interest, where comparison between samples is the preferred approach to problem solving, precision is more important than accuracy |
| Databáze: | OpenAIRE |
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