Physical properties and optical recording performance of In47Sb14Te39 phase change thin films using 514.5-nm wavelength laser beam

Autor:	Chao Liu, Fusong S. Jiang, Huiyong Liu, Liqiu Q. Men, Fuxi Gan
Rok vydání:	1996
Předmět:	Diffraction Materials science Argon business.industry Optical engineering chemistry.chemical_element Sputter deposition Laser law.invention Wavelength Optics chemistry law Optical recording Thin film business
Zdroj:	SPIE Proceedings.
ISSN:	0277-786X
DOI:	10.1117/12.251980
Popis:	Physical properties of In47Sb14Te39 thin films prepared by DC magnetron sputtering method are studied. X- ray diffraction and DSC results indicate that the crystallization compounds include mainly In3SbTe2 with small amounts of InTe, In2Te3. Optical recording test of the films state clearly that larger reflectivity contrast can be obtained at lower power Argon laser irradiation. The erasing contrast is comparatively lower but can be improved by multi-films match.© (1996) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Databáze:	OpenAIRE
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